- 专利标题: Active matrix substrate and manufacturing method thereof
-
申请号: US17852418申请日: 2022-06-29
-
公开(公告)号: US11817459B2公开(公告)日: 2023-11-14
- 发明人: Katsunori Misaki
- 申请人: Sharp Display Technology Corporation
- 申请人地址: JP Kameyama
- 专利权人: SHARP DISPLAY TECHNOLOGY CORPORATION
- 当前专利权人: SHARP DISPLAY TECHNOLOGY CORPORATION
- 当前专利权人地址: JP Kameyama
- 代理机构: KEATING & BENNETT, LLP
- 优先权: JP 21110112 2021.07.01
- 主分类号: G02F1/1368
- IPC分类号: G02F1/1368 ; H01L27/12 ; H01L27/146 ; G02F1/1343
摘要:
Each thin film transistor of an active matrix substrate includes an oxide semiconductor layer, a gate electrode disposed closer to the substrate side of the oxide semiconductor layer, a gate insulating layer, a source electrode, and a drain electrode, wherein the oxide semiconductor layer includes a layered structure including a first layer and a second layer disposed on a part of the first layer and extending across the first layer in a channel width direction when viewed in a normal direction of the substrate, the first layer includes an overlapping portion overlapping with the second layer, and a first portion and a second portion each located on a corresponding one of both sides of the second layer, when viewed in a normal direction of the substrate, the second layer covers an upper surface and a side surface of the overlapping portion of the first layer, the source electrode is electrically connected to at least a part of an upper surface of the first portion, and the drain electrode is electrically connected to at least a part of an upper surface of the second portion.
公开/授权文献
- US20230005968A1 ACTIVE MATRIX SUBSTRATE AND MANUFACTURING METHOD THEREOF 公开/授权日:2023-01-05
信息查询
IPC分类: