Invention Grant
- Patent Title: Vaporization vessel and method
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Application No.: US16856687Application Date: 2020-04-23
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Publication No.: US11821087B2Publication Date: 2023-11-21
- Inventor: Bryan C. Hendrix , Scott L Battle , David J. Eldridge , John N. Gregg , Jacob Thomas , Manuel F. Gonzales , Kenney R. Jordan , Benjamin H. Olson
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C14/18 ; H01L21/02

Abstract:
A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.
Public/Granted literature
- US20200340110A1 VAPORIZATION VESSEL AND METHOD Public/Granted day:2020-10-29
Information query
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