公开(公告)号：US11821087B2

公开(公告)日：2023-11-21

申请号：US16856687

申请日：2020-04-23

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  Scott L Battle ,  David J. Eldridge ,  John N. Gregg ,  Jacob Thomas ,  Manuel F. Gonzales ,  Kenney R. Jordan ,  Benjamin H. Olson

IPC: C23C16/458 ,  C23C14/18 ,  H01L21/02

CPC classification number: C23C16/4583 ,  C23C14/185 ,  H01L21/02271

Abstract: A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.