公开(公告)号：US20240327978A1

公开(公告)日：2024-10-03

申请号：US18740411

申请日：2024-06-11

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4481 ,  C23C16/448 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US12037684B2

公开(公告)日：2024-07-16

申请号：US17681186

申请日：2022-02-25

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4481 ,  C23C16/448 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US11821087B2

公开(公告)日：2023-11-21

申请号：US16856687

申请日：2020-04-23

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  Scott L Battle ,  David J. Eldridge ,  John N. Gregg ,  Jacob Thomas ,  Manuel F. Gonzales ,  Kenney R. Jordan ,  Benjamin H. Olson

IPC: C23C16/458 ,  C23C14/18 ,  H01L21/02

CPC classification number: C23C16/4583 ,  C23C14/185 ,  H01L21/02271

Abstract: A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.

公开(公告)号：US20240084452A1

公开(公告)日：2024-03-14

申请号：US18380142

申请日：2023-10-13

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. HENDRIX ,  Scott L. Battle ,  David J. Eldridge ,  John N. Gregg ,  Jacob Thomas ,  Manuel F. Gonzales ,  Kenney R. Jordan ,  Benjamin H. Olson

IPC: C23C16/458 ,  C23C14/18

CPC classification number: C23C16/4583 ,  C23C14/185 ,  H01L21/02271

Abstract: A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.

公开(公告)号：US20230112884A1

公开(公告)日：2023-04-13

申请号：US17961470

申请日：2022-10-06

Applicant: ENTEGRIS, INC.

Inventor： Scott L. Battle ,  Jacob Thomas ,  Benjamin H. Olson ,  John N. Gregg

IPC: C23C16/448 ,  C23C16/455

Abstract: A modular tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The modular tray is configured with separate components which can enhance the ease of which the modular tray can be inserted into the ampoule, and the tray is configured to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the modular tray and ultimately to the solid precursor materials disposed on the modular tray.

公开(公告)号：US11136169B2

公开(公告)日：2021-10-05

申请号：US16091845

申请日：2017-04-10

Applicant: ENTEGRIS, Inc.

Inventor： Thomas B. Chatterton ,  Jacob Thomas

IPC: B65D45/16 ,  B65D50/00 ,  B65D55/02 ,  B65D45/02 ,  C23C16/448 ,  B65D53/02

Abstract: A tamper-resistant containment package is described, including a container; a cover configured to engage with the container so that the container and cover form an enclosed volume; and at least one tamper-resistant mechanical fastener that is cooperative with the cover and container to render the containment package tamper-resistant when the container and cover are engaged in a sealed state isolating the enclosed volume from an ambient environment surrounding the containment package. Such containment package is usefully employed for storage and transport of chemical reagents that pose a health, safety, and/or environmental risk if released to an exterior environment of the containment package.

公开(公告)号：US11104993B2

公开(公告)日：2021-08-31

申请号：US16044861

申请日：2018-07-25

Applicant: Entegris, Inc.

Inventor： Jordan Hodges ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/08 ,  C23C16/18

Abstract: The invention is directed to a configurable vaporizer or ampoule assembly that uses a configurable vessel body, assembled from one or more support tray modules with their own individual heating assemblies or heater members, bounded by a base member and a lid member to form the whole ampoule. This eliminates the need for the prior art ampoule body that normally holds the support trays and was used to heat each of the support trays from the exterior surface using heating jackets or the like.

公开(公告)号：US20230115177A1

公开(公告)日：2023-04-13

申请号：US17961457

申请日：2022-10-06

Applicant: ENTEGRIS, INC.

Inventor： Scott L. Battle ,  Donn K. Naito ,  John N. Gregg ,  Jacob Thomas ,  Chase Parker ,  James Schindler ,  Bryan C. Hendrix ,  Benjamin H. Olson

IPC: C23C16/448 ,  C23C16/455

Abstract: A tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The tray is configured to be able to have a reduced profile size when compressed to enhance the ease of which the tray can be inserted into the ampoule, and the tray is configured to expand in size to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the tray and ultimately to the solid precursor materials disposed on the tray.

公开(公告)号：US20220275506A1

公开(公告)日：2022-09-01

申请号：US17681186

申请日：2022-02-25

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Cardozo ,  Jacob Thomas

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/50

Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

公开(公告)号：US20240002081A1

公开(公告)日：2024-01-04

申请号：US18214241

申请日：2023-06-26

Applicant: ENTEGRIS, INC.

Inventor： Benjamin H. Olson ,  Dalton Vance Locklear ,  Bryan C. Hendrix ,  Jacob Thomas ,  Aniket Joshi ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett ,  Juan Valdez ,  Michael Watson

IPC: B65B1/22 ,  B65B1/06

CPC classification number: B65B1/22 ,  B65B1/06

Abstract: A system including a vessel for containing a fill material and a vibration source connected to the vessel. The vibration source can increase a bulk density of the fill material. A fill material ratio can be defined as a particle density of the fill material divided by the bulk density of the fill material after vibration. After the vibration source increases the bulk density of the fill material, the fill material ratio can range from about 0.15 to about 0.75.