Invention Grant
- Patent Title: Vacuum pump, and control device of vacuum pump
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Application No.: US16967892Application Date: 2019-02-08
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Publication No.: US11821440B2Publication Date: 2023-11-21
- Inventor: Yanbin Sun , Kengo Saegusa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP 18025854 2018.02.16
- International Application: PCT/JP2019/004745 2019.02.08
- International Announcement: WO2019/159855A 2019.08.22
- Date entered country: 2020-08-06
- Main IPC: F04D29/58
- IPC: F04D29/58 ; F28D9/00 ; F04D19/04

Abstract:
To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.
Public/Granted literature
- US20210025407A1 VACUUM PUMP, AND CONTROL DEVICE OF VACUUM PUMP Public/Granted day:2021-01-28
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