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公开(公告)号：US20230250826A1
公开(公告)日：2023-08-10
申请号：US18004989
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Kengo Saegusa
CPC classification number: F04D19/042 , F04D29/023 , F04D29/5853 , F04D19/044 , F04D19/048 , F04D29/321 , F05C2201/0466 , F05C2201/0412 , F05C2203/08 , F05C2251/048
Abstract: A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
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公开(公告)号：US11333153B2
公开(公告)日：2022-05-17
申请号：US16467416
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Hideki Omori , Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi
Abstract: A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.
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公开(公告)号：US12234828B2
公开(公告)日：2025-02-25
申请号：US18004989
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Kengo Saegusa
Abstract: A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
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公开(公告)号：US11898565B2
公开(公告)日：2024-02-13
申请号：US17611362
申请日：2020-05-22
Applicant: Edwards Japan Limited
Inventor： Kengo Saegusa , Nahoko Yoshihara , Yoshinobu Ohtachi
CPC classification number: F04D19/042 , F04D19/044 , F04D29/5853 , F04D29/646 , F04D19/048 , F04D29/522
Abstract: A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided.
The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.-
公开(公告)号：US10823200B2
公开(公告)日：2020-11-03
申请号：US15780155
申请日：2016-12-08
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
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Patent Agency Ranking
公开(公告)号：US20200099179A1
公开(公告)日：2020-03-26
申请号：US16469794
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi , Hideki Omori
Abstract: A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.
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公开(公告)号：US11821440B2
公开(公告)日：2023-11-21
申请号：US16967892
申请日：2019-02-08
Applicant: Edwards Japan Limited
Inventor： Yanbin Sun , Kengo Saegusa
CPC classification number: F04D29/5813 , F28D9/0081 , F04D19/042
Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.
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公开(公告)号：US11215187B2
公开(公告)日：2022-01-04
申请号：US16341495
申请日：2017-09-29
Applicant: Edwards Japan Limited
Inventor： Kengo Saegusa , Yanbin Sun
Abstract: A vacuum pump, and a waterproof structure and a control apparatus applied to the vacuum pump which improve efficiency of on-site maintenance work and prevent water from penetrating into a connector connecting portion when a cover is removed during circuit separation or the like. When performing maintenance work, after a chassis of a control apparatus is lowered by around several tens of millimeters, the chassis of the control apparatus is pulled out in a radial direction of a pump. Accordingly, a pump main body and the control apparatus can be readily attached and detached even when sufficient empty space is not available in an axial direction of the vacuum pump. A wall portion is circumferentially protrusively provided in side portions of the base portion and the control apparatus. Furthermore, a sealing member and a lid are inserted into a gap. Therefore, water droplets cannot easily penetrate into the gap.
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公开(公告)号：US20210025407A1
公开(公告)日：2021-01-28
申请号：US16967892
申请日：2019-02-08
Applicant: Edwards Japan Limited
Inventor： Yanbin Sun , Kengo Saegusa
Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.
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公开(公告)号：US20180355888A1
公开(公告)日：2018-12-13
申请号：US15780155
申请日：2016-12-08
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
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