- 专利标题: Semiconductor substrate processing methods
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申请号: US17444938申请日: 2021-08-12
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公开(公告)号: US11823953B2公开(公告)日: 2023-11-21
- 发明人: Michael J. Seddon
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Adam R. Stephenson, LTD.
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; H01L21/04 ; H01L29/16
摘要:
Implementations of a method of forming a plurality of semiconductor devices on a semiconductor substrate may include: providing a semiconductor substrate having a first surface, a second surface, a size, and a thickness where the second surface opposes the first surface and the thickness is between the first surface and the second surface. The method may include processing the semiconductor substrate through a plurality of semiconductor device fabrication processes to form a plurality of semiconductor devices on the first surface. The thickness may be between 100 microns and 575 microns and the size may be 150 mm. The semiconductor substrate may not be coupled with a carrier or support.
公开/授权文献
- US20210375679A1 SEMICONDUCTOR SUBSTRATE PROCESSING METHODS 公开/授权日:2021-12-02
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