Invention Grant
- Patent Title: Process for manufacturing a strained semiconductor device and corresponding strained semiconductor device
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Application No.: US17372115Application Date: 2021-07-09
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Publication No.: US11837558B2Publication Date: 2023-12-05
- Inventor: Santo Alessandro Smerzi , Michele Calabretta , Alessandro Sitta , Crocifisso Marco Antonio Renna , Giuseppe D'Arrigo
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: SEED INTELLECTUAL PROPERTY LAW GROUP LLP
- Priority: IT 2018000004756 2018.04.20
- The original application number of the division: US16389849 2019.04.19
- Main IPC: H01L23/06
- IPC: H01L23/06 ; H01L23/00 ; H01L21/52 ; H01L23/14 ; H01L29/78

Abstract:
A process for manufacturing a strained semiconductor device envisages: providing a die of semiconductor material, in which elementary components of the semiconductor device have been integrated by means of initial front-end steps; and coupling, using the die-attach technique, the die to a support, at a coupling temperature. The aforesaid coupling step envisages selecting the value of the coupling temperature at a value higher than an operating temperature of use of the semiconductor device, and moreover selecting the material of the support so that it is different from the material of the die in order to determine, at the operating temperature, a coupling stress that is a function of the different values of the coefficients of thermal expansion of the materials of the die and of the support and of the temperature difference between the coupling temperature and the operating temperature. Furthermore, additional stress can be enhanced by means of different embodiments involving the support, such as ring or multi-layer frame.
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