Invention Grant
- Patent Title: Composite sintered body, electrostatic chuck member, and electrostatic chuck device
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Application No.: US16480264Application Date: 2018-02-19
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Publication No.: US11842914B2Publication Date: 2023-12-12
- Inventor: Nobuhiro Hidaka , Hironori Kugimoto
- Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Merchant & Gould P.C.
- Priority: JP 17032622 2017.02.23 JP 17032623 2017.02.23
- International Application: PCT/JP2018/005719 2018.02.19
- International Announcement: WO2018/155374A 2018.08.30
- Date entered country: 2019-07-23
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/103 ; H01J37/32 ; H01L21/67

Abstract:
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
Public/Granted literature
- US20190385884A1 COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE Public/Granted day:2019-12-19
Information query
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