公开(公告)号：US11551962B2

公开(公告)日：2023-01-10

申请号：US17041905

申请日：2019-03-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Mamoru Kosakai ,  Nobuhiro Hidaka ,  Naoto Kimura ,  Hironori Kugimoto

IPC: H01L21/683 ,  C04B35/117 ,  H02N13/00

Abstract: A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.

公开(公告)号：US12074050B2

公开(公告)日：2024-08-27

申请号：US16497743

申请日：2018-03-26

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Naoto Kimura

IPC: C04B35/645 ,  C04B35/117 ,  C04B35/626 ,  C04B35/628 ,  H01J37/32 ,  H01L21/683

CPC classification number: H01L21/6833 ,  C04B35/117 ,  C04B35/62625 ,  C04B35/62635 ,  C04B35/628 ,  C04B35/645 ,  H01J37/32715 ,  C04B35/62655 ,  C04B2235/3217 ,  C04B2235/3826 ,  C04B2235/656 ,  C04B2235/786 ,  C04B2235/80 ,  C04B2235/87 ,  C04B2235/9669 ,  H01J37/32642 ,  H01J2237/2007

Abstract: A composite sintered body is a ceramic composite sintered body which includes metal oxide which is a main phase, and silicon carbide which is a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.

公开(公告)号：US11990362B2

公开(公告)日：2024-05-21

申请号：US17612173

申请日：2020-05-21

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Megumi Ootomo ,  Jun Arikawa

IPC: H01L21/68 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32724 ,  H01L21/68757 ,  C04B2235/549 ,  H01J2237/334

Abstract: A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

公开(公告)号：US11107719B2

公开(公告)日：2021-08-31

申请号：US16069141

申请日：2017-01-12

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Hironori Kugimoto ,  Mamoru Kosakai

IPC: H01L21/683 ,  C04B35/103 ,  C04B35/111 ,  C04B35/626 ,  H01L21/687 ,  C04B35/117 ,  C04B35/645

Abstract: An electrostatic chuck device includes: a base having one principal surface which is a placing surface on which a plate-shaped sample is placed, wherein the base is made from a sintered compact of ceramic particles, which include silicon carbide particles and aluminum oxide particles, as a forming material; and an electrostatic attraction electrode which is provided on a surface of the base on the side opposite to the placing surface of the base, or in the interior of the base, in which the volume resistivity value of the sintered compact is 0.5×1015 Ωcm or more in the entire range from 24° C. to 300° C., a graph which shows the relationship of the volume resistivity value of the sintered compact to a temperature at which the volume resistivity value of the sintered compact is measured has a maximum value in the range from 24° C. to 300° C., and the amount of metal impurities in the sintered compact other than aluminum and silicon in the sintered compact is 100 ppm or less.

公开(公告)号：US11842914B2

公开(公告)日：2023-12-12

申请号：US16480264

申请日：2018-02-19

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Hironori Kugimoto

IPC: H01L21/683 ,  C04B35/103 ,  H01J37/32 ,  H01L21/67

CPC classification number: H01L21/6833 ,  C04B35/103 ,  H01J37/32724 ,  H01L21/67103 ,  C04B2235/3217 ,  C04B2235/3826 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/85 ,  C04B2235/9669 ,  H01J2237/002

Abstract: This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.

公开(公告)号：US11817339B2

公开(公告)日：2023-11-14

申请号：US17041935

申请日：2019-03-26

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Naoto Kimura

IPC: H01T23/00 ,  H01L21/683 ,  C04B35/117 ,  C04B35/64 ,  H01J37/32

CPC classification number: H01L21/6833 ,  C04B35/117 ,  C04B35/64 ,  H01J37/32715 ,  C04B2235/3217 ,  C04B2235/3834 ,  C04B2235/3839 ,  C04B2235/422 ,  C04B2235/6562 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/85 ,  H01J2237/334

Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.

公开(公告)号：US11784079B2

公开(公告)日：2023-10-10

申请号：US16619921

申请日：2018-06-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Hironori Kugimoto

IPC: H01L21/683 ,  C04B35/117 ,  H02N13/00

CPC classification number: H01L21/6833 ,  C04B35/117 ,  C04B2235/3217 ,  C04B2235/3463 ,  C04B2235/3826 ,  C04B2235/5472 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/80 ,  C04B2235/85 ,  C04B2235/87 ,  H02N13/00

Abstract: A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.

公开(公告)号：US11387132B2

公开(公告)日：2022-07-12

申请号：US16072750

申请日：2017-01-27

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Yoshiki Yoshioka ,  Nobuhiro Hidaka ,  Hironori Kugimoto

IPC: H01L21/683 ,  C04B35/117 ,  C04B35/626 ,  C04B35/645 ,  H01J37/32 ,  B25J19/00 ,  B25J15/00 ,  H01L21/687 ,  B25J9/00 ,  B25J11/00

Abstract: Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.

公开(公告)号：US11345639B2

公开(公告)日：2022-05-31

申请号：US16981089

申请日：2019-03-22

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Naoto Kimura

IPC: C04B35/117 ,  C04B35/505 ,  H01L21/683 ,  C04B35/626 ,  C04B35/645

Abstract: A ceramic composite sintered body, including: a metal oxide as a main phase, and silicon carbide as a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and an average crystal grain size of the silicon carbide dispersed at the crystal grain boundaries of the metal oxide is 0.30 μm or less.