- 专利标题： Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
-
申请号： US17675832申请日： 2022-02-18
-
公开(公告)号： US11847851B2公开(公告)日： 2023-12-19
- 发明人: Julius Ming-Lin Tsai , Mike Daneman , Sanjiv Kapoor
- 申请人： INVENSENSE, INC.
- 申请人地址： US CA San Jose
- 专利权人： INVENSENSE, INC.
- 当前专利权人： INVENSENSE, INC.
- 当前专利权人地址： US CA San Jose
- 代理机构： Amin, Turocy & Watson, LLP
- 分案原申请号： US15853396 2017.12.22
- 主分类号： B06B1/06
- IPC分类号： B06B1/06 ; B81B7/00 ; G06V40/13 ; B81C1/00 ; G01H11/08
摘要：
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
公开/授权文献
信息查询
IPC分类:
