Invention Grant
- Patent Title: Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation
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Application No.: US16849871Application Date: 2020-04-15
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Publication No.: US11854839B2Publication Date: 2023-12-26
- Inventor: Andrew B. Cowe , Gordon Hill
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Cesari and McKenna, LLP
- Main IPC: F16K3/02
- IPC: F16K3/02 ; H01L21/67 ; F16K3/16 ; C23C16/44 ; B08B5/00 ; H01J37/32 ; F16K3/18

Abstract:
An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.
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