公开(公告)号：US20210327727A1

公开(公告)日：2021-10-21

申请号：US16849871

申请日：2020-04-15

Applicant: MKS Instruments, Inc.

Inventor： Andrew B. Cowe ,  Gordon Hill

IPC: H01L21/67 ,  F16K3/02 ,  F16K3/16 ,  F16K3/18 ,  C23C16/44 ,  B08B5/00 ,  H01J37/32

Abstract: An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.

公开(公告)号：US11854839B2

公开(公告)日：2023-12-26

申请号：US16849871

申请日：2020-04-15

Applicant: MKS Instruments, Inc.

Inventor： Andrew B. Cowe ,  Gordon Hill

IPC: F16K3/02 ,  H01L21/67 ,  F16K3/16 ,  C23C16/44 ,  B08B5/00 ,  H01J37/32 ,  F16K3/18

CPC classification number: H01L21/67017 ,  B08B5/00 ,  C23C16/4405 ,  F16K3/0227 ,  F16K3/16 ,  F16K3/18 ,  H01J37/32357 ,  H01J2237/335

Abstract: An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.