- 专利标题: Optical inspection apparatus
-
申请号: US17205487申请日: 2021-03-18
-
公开(公告)号: US11867612B2公开(公告)日: 2024-01-09
- 发明人: Je Won Yoo , Basrur Veidhes , Dae Hyun Kim , Hyun Min Cho , Jong Won Lee , Joo Yeol Lee
- 申请人: Samsung Display Co., LTD.
- 申请人地址: KR Yongin-si
- 专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址: KR Yongin-si
- 代理机构: KILE PARK REED & HOUTTEMAN PLLC
- 优先权: KR 20200075648 2020.06.22
- 主分类号: G01N21/25
- IPC分类号: G01N21/25 ; G02B21/06 ; G02B21/36 ; G01N21/17 ; G02B21/26 ; G01R31/26 ; G01R31/265
摘要:
An optical inspection apparatus includes a stage that supports a target substrate, the target substrate including a plurality of light emitting elements, a jig that applies an electrical signal to the target substrate, the jig including a regulation resistor, a microscope that generates magnified image data of the target substrate, a camera that captures the magnified image data to generate a color image of the target substrate, and an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate.
公开/授权文献
- US20210396654A1 OPTICAL INSPECTION APPARATUS 公开/授权日:2021-12-23
信息查询