- 专利标题: Monolithic modular microwave source with integrated process gas distribution
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申请号: US16586482申请日: 2019-09-27
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公开(公告)号: US11881384B2公开(公告)日: 2024-01-23
- 发明人: James Carducci , Richard C. Fovell , Larry D. Elizaga , Silverst Rodrigues , Vladimir Knyazik , Philip Allan Kraus , Thai Cheng Chua
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; C23C16/511 ; C23C16/455
摘要:
Embodiments disclosed herein include a housing for a source array. In an embodiment, the housing comprises a conductive body, where the conductive body comprises a first surface and a second surface opposite from the first surface. In an embodiment a plurality of openings are formed through the conductive body and a channel is disposed into the second surface of the conductive body. In an embodiment, a cover is over the channel, and the cover comprises first holes that pass through a thickness of the cover. In an embodiment, the housing further comprises a second hole through a thickness of the conductive body. In an embodiment, the second hole intersects with the channel.
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