Invention Grant
- Patent Title: Semiconductor storage device with transistors of peripheral circuits on two chips
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Application No.: US17183809Application Date: 2021-02-24
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Publication No.: US11881465B2Publication Date: 2024-01-23
- Inventor: Nobuaki Okada , Toshiki Hisada
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP 20152188 2020.09.10
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L23/00 ; H01L25/065 ; H01L25/18 ; G11C16/08 ; H10B41/27 ; H10B43/27 ; G11C16/24

Abstract:
A semiconductor storage device includes first and second chips. The first chip includes a first semiconductor substrate, first conductive layers arranged in a first direction and extending in a second direction, a semiconductor column extending in the first direction and facing the first conductive layers, a first charge storage film formed between the first conductive layers and the semiconductor column, a plurality of first transistors on the first semiconductor substrate, and first bonding electrodes electrically connected to a portion of the plurality of first transistors. The second chip includes a second semiconductor substrate, a plurality of second transistors on the second semiconductor substrate, and second bonding electrodes electrically connected to a portion of the plurality of second transistors, and bonded to the first bonding electrodes. A thickness of the second semiconductor substrate in the first direction is smaller than a thickness of the first semiconductor substrate in the first direction.
Public/Granted literature
- US20220077088A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2022-03-10
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