Invention Grant
- Patent Title: SOI lateral homogenization field high voltage power semiconductor device, manufacturing method and application thereof
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Application No.: US17744779Application Date: 2022-05-16
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Publication No.: US11888022B2Publication Date: 2024-01-30
- Inventor: Wentong Zhang , Ning Tang , Ke Zhang , Nailong He , Ming Qiao , Zhaoji Li , Bo Zhang
- Applicant: University of Electronic Science and Technology of China
- Applicant Address: CN Chengdu
- Assignee: University of Electronic Science and Technology of China
- Current Assignee: University of Electronic Science and Technology of China
- Current Assignee Address: CN Chengdu
- Agency: Bayramoglu Law Offices LLC
- Priority: CN 2110952823.4 2021.08.19
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/40 ; H01L29/66 ; H01L29/739 ; H01L29/78

Abstract:
An SOI lateral homogenization field high voltage power semiconductor device, and a manufacturing method and application thereof are provided. The device includes a type I conductive semiconductor substrate, a type II conductive drift region, a type I field clamped layer, type I and type II conductive well regions, the first dielectric oxide layer forming a field oxide layer, the second dielectric oxide layer forming a gate oxide layer, a type II conductive buried dielectric layer, a type II conductive source heavily doped region, a type II conductive drain heavily doped region. The first dielectric oxide layer and the floating field plate polysilicon electrodes form a vertical floating field plate distributed throughout the type II conductive drift region to form a vertical floating equipotential field plate array. When the device is in on-state, high doping concentration can be realized by the full-region depletion effect form the vertical field plate arrays.
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