Invention Grant
- Patent Title: Method of producing a silicon carbide device with a trench gate
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Application No.: US18073860Application Date: 2022-12-02
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Publication No.: US11888032B2Publication Date: 2024-01-30
- Inventor: Caspar Leendertz , Thomas Basler , Paul Ellinghaus , Rudolf Elpelt , Michael Hell , Jens Peter Konrath , Shiqin Niu , Dethard Peters , Konrad Schraml , Bernd Leonhard Zippelius
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE 2019121859.4 2019.08.14
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/10 ; H01L29/423 ; H01L29/78

Abstract:
A method of producing a silicon carbide (SiC) device includes: forming a stripe-shaped trench gate structure that extends from a first surface of a SiC body into the SiC body, the gate structure having a gate length along a lateral first direction, a bottom surface and a first gate sidewall of the gate structure being connected via a first bottom edge of the gate structure; forming at least one source region of a first conductivity type; and forming a shielding region of a second conductivity type in contact with the first bottom edge of the gate structure across at least 20% of the gate length. Forming the shielding region includes: forming a deep shielding portion; and forming a top shielding portion between the first surface and the deep shielding portion, the top shielding portion being in contact with the first bottom edge.
Public/Granted literature
- US20230094032A1 METHOD OF PRODUCING A SILICON CARBIDE DEVICE WITH A TRENCH GATE Public/Granted day:2023-03-30
Information query
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