Invention Grant
- Patent Title: Laser chip for flip-chip bonding on silicon photonics chips
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Application No.: US17076162Application Date: 2020-10-21
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Publication No.: US11888286B2Publication Date: 2024-01-30
- Inventor: Xiaoguang He , Radhakrishnan L. Nagarajan
- Applicant: INPHI CORPORATION
- Applicant Address: US CA San Jose
- Assignee: MARVELL ASIA PTE LTD
- Current Assignee: MARVELL ASIA PTE LTD
- Current Assignee Address: SG Singapore
- Main IPC: H01S5/02
- IPC: H01S5/02 ; H01S5/0238 ; H01S5/028 ; H01S5/0237 ; H01S5/227 ; H01S5/22 ; H01S5/0234

Abstract:
A laser chip for flip-chip bonding on a silicon photonics chip with passive alignment features. The laser chip includes a chip body made of a p-region and a n-region in vertical direction and extended from a front facet to a rear facet in longitudinal direction, a pair of first vertical stoppers formed respectively beyond two sides of the chip body based on a wider width of the n-region, an active region buried in the chip body between the p-region and the n-region in the vertical direction and extended from the front facet to the rear facet in the longitudinal direction, an alignment mark formed on a top surface of the p-region near the front facet with a lateral distance defined in sub-micron precision relative to the active region; and a thin metal film on the surface of the p-region having a cleaved edge shared with the front facet.
Public/Granted literature
- US20220123518A1 LASER CHIP FOR FLIP-CHIP BONDING ON SILICON PHOTONICS CHIPS Public/Granted day:2022-04-21
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