Invention Grant
- Patent Title: Vacuum pump and heating device therefor
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Application No.: US16616293Application Date: 2018-05-23
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Publication No.: US11889595B2Publication Date: 2024-01-30
- Inventor: Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo
- Agency: Shumaker & Sieffert, P.A.
- Priority: JP 17106108 2017.05.30
- International Application: PCT/JP2018/019824 2018.05.23
- International Announcement: WO2018/221345A 2018.12.06
- Date entered country: 2019-11-22
- Main IPC: F04D29/58
- IPC: F04D29/58 ; H05B1/02 ; F04D19/04 ; F16K49/00 ; F16L53/37 ; F16L53/38

Abstract:
A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.
Public/Granted literature
- US20200092952A1 VACUUM PUMP AND HEATING DEVICE THEREFOR Public/Granted day:2020-03-19
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