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公开(公告)号：US12158152B2
公开(公告)日：2024-12-03
申请号：US17609626
申请日：2020-05-12
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada , Toshiki Yamaguchi
Abstract: Provided is a vacuum pump suitable for preventing the backflow of a particle from the vacuum pump toward a vacuum chamber. The vacuum pump includes a turbomolecular pump portion exhausting gas molecules by a rotor blade and a stator blade, and a thread groove pump portion provided downstream of the turbomolecular pump portion and exhausting the gas molecules by a thread groove flow path formed by a cylindrical rotary component (cylindrical portion) and a cylindrical stator component (thread groove pump portion stator) provided on an outer periphery of the cylindrical rotary component, wherein a bounce back prevention means for preventing a particle from bouncing from the thread groove pump portion back toward the turbomolecular pump portion is provided downstream of the turbomolecular pump portion.
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公开(公告)号：US11384770B2
公开(公告)日：2022-07-12
申请号：US17044155
申请日：2019-03-20
Applicant: Edwards Japan Limited
Inventor： Hideo Fukami , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
IPC: F04D19/04 , F04D27/00 , F04D29/058 , F04D29/053 , F04D29/056
Abstract: The present disclosure can provide a vacuum pump capable of obtaining a rotation direction and correcting the rotation direction without adding a dedicated rotation direction sensor even in a state of low-speed rotation. The control device is capable of obtaining at least a first state in which a rotor shaft rotates at relatively high speed, and a second state in which the rotor shaft deviates within a gap between the rotor shaft and a protective bearing and rotates at relatively low speed while revolving, acquires output information of a radial displacement sensor, obtains a rotation direction of the rotor shaft in the second state on the basis of the output information, determines whether the rotation direction is normal or not, and when the rotation direction is not normal, stops the rotation and increases rotation speed to achieve a normal rotation direction.
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公开(公告)号：US20170363101A1
公开(公告)日：2017-12-21
申请号：US15545145
申请日：2016-01-19
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.
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公开(公告)号：US20150240829A1
公开(公告)日：2015-08-27
申请号：US14429645
申请日：2013-09-18
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada , Yoshiyuki Sakaguchi , Yoshiyuki Takai
IPC: F04D29/051 , F04D29/058 , F04D19/04 , F04D29/02 , F04D29/08 , F04D29/38
CPC classification number: F04D29/051 , F04D19/042 , F04D19/044 , F04D19/046 , F04D19/048 , F04D29/023 , F04D29/058 , F04D29/083 , F04D29/38 , F04D29/662 , F05D2260/95
Abstract: A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.
Abstract translation: 真空泵的转子具有第一和第二圆柱体和用于将圆柱体的端部连接在一起的连接部分。 第一圆柱体在其外圆周表面上具有多个转子叶片，并且当转子叶片沿着真空泵的轴向中心与多个定子叶片交替排列时构成叶片排出部分。 当螺纹槽排气流道至少形成在第二圆柱体的内周上时，第二圆筒体构成螺纹槽排气部。 在该转子中，在第一圆筒体或连接部的内周面上设置有用于转子的平衡部，并且在平衡部中设置质量补充机构。
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公开(公告)号：US11480182B2
公开(公告)日：2022-10-25
申请号：US17265373
申请日：2019-08-02
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: Provided is a vacuum pump including a turbomolecular mechanism having rotor blades and stator blades alternately arranged in multiple stages in an axial direction inside a casing having an inlet port that sucks gas from an outside and an outlet port that exhausts the sucked gas to the outside, the vacuum pump including: a plurality of annular spacers that are stacked on each other and position the stator blades in the axial direction; the casing that has a cylindrical portion arranged to surround outer peripheries of the plurality of stacked spacers and a base portion attached to a lower portion of the cylindrical portion; and an upper radial positioning portion and a lower radial positioning portion provided at two vertical positions inside the cylindrical portion and coaxially hold at least a spacer of an uppermost stage and a spacer of a lowermost stage among the plurality of stacked spacers.
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Patent Agency Ranking
公开(公告)号：US20220163053A1
公开(公告)日：2022-05-26
申请号：US17436426
申请日：2020-03-09
Applicant: Edwards Japan Limited
Inventor： Hideki Enosawa , Manabu Nonaka , Yasushi Maejima , Tsutomu Takaada
Abstract: A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.
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公开(公告)号：US20200092952A1
公开(公告)日：2020-03-19
申请号：US16616293
申请日：2018-05-23
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.
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公开(公告)号：US11889595B2
公开(公告)日：2024-01-30
申请号：US16616293
申请日：2018-05-23
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC classification number: H05B1/0244 , F04D19/042 , F04D29/58 , F04D29/584 , F04D19/04 , F16K49/002 , F16L53/37 , F16L53/38
Abstract: A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.
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公开(公告)号：US20220235776A1
公开(公告)日：2022-07-28
申请号：US17609626
申请日：2020-05-12
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada , Toshiki Yamaguchi
IPC: F04D19/04
Abstract: Provided is a vacuum pump suitable for preventing the backflow of a particle from the vacuum pump toward a vacuum chamber. The vacuum pump includes a turbomolecular pump portion exhausting gas molecules by a rotor blade and a stator blade, and a thread groove pump portion provided downstream of the turbomolecular pump portion and exhausting the gas molecules by a thread groove flow path formed by a cylindrical rotary component (cylindrical portion) and a cylindrical stator component (thread groove pump portion stator) provided on an outer periphery of the cylindrical rotary component, wherein a bounce back prevention means for preventing a particle from bouncing from the thread groove pump portion back toward the turbomolecular pump portion is provided downstream of the turbomolecular pump portion.
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公开(公告)号：US20210123449A1
公开(公告)日：2021-04-29
申请号：US17044155
申请日：2019-03-20
Applicant: Edwards Japan Limited
Inventor： Hideo Fukami , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: The present disclosure can provide a vacuum pump capable of obtaining a rotation direction and correcting the rotation direction without adding a dedicated rotation direction sensor even in a state of low-speed rotation. The control device is capable of obtaining at least a first state in which a rotor shaft rotates at relatively high speed, and a second state in which the rotor shaft deviates within a gap between the rotor shaft and a protective bearing and rotates at relatively low speed while revolving, acquires output information of a radial displacement sensor, obtains a rotation direction of the rotor shaft in the second state on the basis of the output information, determines whether the rotation direction is normal or not, and when the rotation direction is not normal, stops the rotation and increases rotation speed to achieve a normal rotation direction.
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