Invention Grant
- Patent Title: Imaging via zeroth order suppression
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Application No.: US17415101Application Date: 2019-12-12
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Publication No.: US11892776B2Publication Date: 2024-02-06
- Inventor: Johannes Jacobus Matheus Baselmans , Duan-Fu Stephen Hsu , Willem Jan Bouman , Frank Jan Timmermans , Marie-claire Van Lare
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- International Application: PCT/EP2019/084825 2019.12.12
- International Announcement: WO2020/141052A 2020.07.09
- Date entered country: 2021-06-17
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
Apparatuses and techniques for suppressing a zeroth order portion of a configured radiation beam. In some embodiments, an extreme ultraviolet (EUV) lithographic apparatus for forming an image on a substrate by use of an EUV radiation beam that is configured by a patterning device comprising a pattern of reflective regions and partially reflective regions, wherein the partially reflective regions are configured to suppress and apply a phase shift to a portion of the EUV radiation beam, may include a projection system. The projection system may be configured to suppress a zeroth order portion of a configured EUV radiation beam, and direct an unsuppressed portion of a configured EUV radiation beam towards a substrate to form an image on the substrate.
Public/Granted literature
- US20220066327A1 IMPROVED IMAGING VIA ZEROTH ORDER SUPPRESSION Public/Granted day:2022-03-03
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