Invention Grant
- Patent Title: Magnetoresistive random access memory and method for fabricating the same
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Application No.: US17088531Application Date: 2020-11-03
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Publication No.: US11895926B2Publication Date: 2024-02-06
- Inventor: Hui-Lin Wang , Po-Kai Hsu , Ju-Chun Fan , Ching-Hua Hsu , Yi-Yu Lin , Hung-Yueh Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 2011083857.6 2020.10.12
- Main IPC: H10N50/80
- IPC: H10N50/80 ; H10B61/00 ; H10N50/01

Abstract:
A method for fabricating a semiconductor device includes the steps of first forming a first inter-metal dielectric (IMD) layer on a substrate and a metal interconnection in the first IMD layer, forming a magnetic tunneling junction (MTJ) and a top electrode on the metal interconnection, forming a spacer adjacent to the MTJ and the top electrode, forming a second IMD layer around the spacer, forming a cap layer on the top electrode, the spacer, and the second IMD layer, and then patterning the cap layer to form a protective cap on the top electrode and the spacer.
Public/Granted literature
- US20220115584A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-04-14
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