Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US17507989Application Date: 2021-10-22
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Publication No.: US11910611B2Publication Date: 2024-02-20
- Inventor: Dong Hoon Jang , Woo Sung Yang , Joon Sung Lim , Sung Min Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20180154259 2018.12.04
- Main IPC: H10B43/40
- IPC: H10B43/40 ; H01L23/522 ; H10B43/27 ; H10B43/10

Abstract:
A nonvolatile memory device includes a substrate including a cell region and a peripheral circuit region, a stacked structure on the cell region, the stacked structure including a plurality of gate patterns separated from each other and stacked sequentially, a semiconductor pattern connected to the substrate through the stacked structure, a peripheral circuit element on the peripheral circuit region, a first interlayer insulating film on the cell region and the peripheral circuit region, the first interlayer insulating film covering the peripheral circuit element, and a lower contact connected to the peripheral circuit element through the first interlayer insulating film, a height of a top surface of the lower contact being lower than or equal to a height of a bottom surface of a lowermost gate pattern of the plurality of gate patterns on the first interlayer insulating film.
Information query