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公开(公告)号:US11758719B2
公开(公告)日:2023-09-12
申请号:US17391289
申请日:2021-08-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535 , G11C16/04
CPC classification number: H10B41/27 , H01L23/535 , G11C16/0483
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US11088157B2
公开(公告)日:2021-08-10
申请号:US16543535
申请日:2019-08-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H01L27/11556 , H01L23/535 , G11C16/04
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US20230413545A1
公开(公告)日:2023-12-21
申请号:US18365915
申请日:2023-08-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535
CPC classification number: H10B41/27 , G11C16/0483 , H01L23/535
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US20190312054A1
公开(公告)日:2019-10-10
申请号:US16239130
申请日:2019-01-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jang Gn YUN , Joon Sung Lim , Eun Suk Cho
IPC: H01L27/11582 , H01L27/11565
Abstract: A three-dimensional semiconductor device and method of fabrication is provided. The three-dimensional semiconductor device includes a stacked structure on a lower structure. The stacked structure includes interlayer insulating layers and gate electrodes. The device also includes a channel structure on the lower structure, with the channel structure including a horizontal portion between the stacked structure and the lower structure. The channel structure also includes a plurality of vertical portions extended in a vertical direction. The device also includes support patterns on the lower structure. In addition, the device includes a gate dielectric structure having a lower portion and upper portions. The method of fabrication includes forming the stacked structure with holes. The method also includes removing a sacrificial layer from a horizontal area above the lower structure and forming a channel structure within the holes and within a horizontal space made by removal of the sacrificial layer.
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公开(公告)号:US10204901B2
公开(公告)日:2019-02-12
申请号:US15723669
申请日:2017-10-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyo Seok Woo , Jang Gn Yun , Joon Sung Lim , Sung Min Hwang
IPC: H01L27/00 , H01L27/07 , H01L23/00 , H01L49/02 , H01L29/43 , H01L21/3105 , H01L21/768 , H01L29/49
Abstract: A semiconductor device is provided including a resistor structure on a semiconductor substrate. The resistor structure includes pad portions and a resistor body connecting the pad portions. The pad portions each have a width greater than a width of the resistor body. The pad portions each include a pad pattern and a liner pattern covering a sidewall and a lower surface of the pad pattern. The resistor body extends laterally from the liner pattern. The pad pattern includes a different material from the resistor body and the liner pattern.
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公开(公告)号:US11910611B2
公开(公告)日:2024-02-20
申请号:US17507989
申请日:2021-10-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dong Hoon Jang , Woo Sung Yang , Joon Sung Lim , Sung Min Hwang
IPC: H10B43/40 , H01L23/522 , H10B43/27 , H10B43/10
CPC classification number: H10B43/40 , H01L23/5226 , H10B43/10 , H10B43/27
Abstract: A nonvolatile memory device includes a substrate including a cell region and a peripheral circuit region, a stacked structure on the cell region, the stacked structure including a plurality of gate patterns separated from each other and stacked sequentially, a semiconductor pattern connected to the substrate through the stacked structure, a peripheral circuit element on the peripheral circuit region, a first interlayer insulating film on the cell region and the peripheral circuit region, the first interlayer insulating film covering the peripheral circuit element, and a lower contact connected to the peripheral circuit element through the first interlayer insulating film, a height of a top surface of the lower contact being lower than or equal to a height of a bottom surface of a lowermost gate pattern of the plurality of gate patterns on the first interlayer insulating film.
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公开(公告)号:US11139314B2
公开(公告)日:2021-10-05
申请号:US16686967
申请日:2019-11-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Woo Sung Yang , Dong Sik Lee
IPC: H01L27/11582 , H01L27/1157 , H01L27/11573
Abstract: A semiconductor device includes gate electrodes spaced apart from each other in a first direction perpendicular to a substrate's upper surface, and extending by different lengths in a second direction perpendicular to the first direction. The device further includes first and second channels penetrating the gate electrodes and extending in the first direction, a horizontal portion disposed in lower portions of the gate electrodes and connecting lower portions of the first and second channels to each other, and a source line disposed in an upper portion of the second channel and connected to the second channel. The gate electrodes include memory cell electrodes included in memory cells, a first ground select electrode disposed in lower portions of the memory cell electrodes, a second ground select electrode disposed in upper portions of the memory cell electrodes, and a string select electrode disposed in upper portions of the memory cell electrodes.
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公开(公告)号:US12127402B2
公开(公告)日:2024-10-22
申请号:US18365915
申请日:2023-08-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535 , G11C16/04
CPC classification number: H10B41/27 , H01L23/535 , G11C16/0483
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US20200227435A1
公开(公告)日:2020-07-16
申请号:US16686967
申请日:2019-11-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Woo Sung Yang , Dong Sik Lee
IPC: H01L27/11582 , H01L27/11524 , H01L27/11556 , H01L27/11529 , H01L27/1157 , H01L27/11573
Abstract: A semiconductor device includes gate electrodes spaced apart from each other in a first direction perpendicular to a substrate's upper surface, and extending by different lengths in a second direction perpendicular to the first direction. The device further includes first and second channels penetrating the gate electrodes and extending in the first direction, a horizontal portion disposed in lower portions of the gate electrodes and connecting lower portions of the first and second channels to each other, and a source line disposed in an upper portion of the second channel and connected to the second channel. The gate electrodes include memory cell electrodes included in memory cells, a first ground select electrode disposed in lower portions of the memory cell electrodes, a second ground select electrode disposed in upper portions of the memory cell electrodes, and a string select electrode disposed in upper portions of the memory cell electrodes.
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公开(公告)号:US09853045B2
公开(公告)日:2017-12-26
申请号:US15173888
申请日:2016-06-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Jang Gn Yun , Ahn Sik Moon , Se Jun Park , Zhiliang Xia , Joon Sung Lim
IPC: H01L27/11582 , H01L27/1157 , H01L27/11565 , H01L27/11573
CPC classification number: H01L27/11582 , H01L27/11565 , H01L27/1157 , H01L27/11573
Abstract: A semiconductor device includes a gate stack including gate electrodes stacked vertically on a substrate. Channel holes penetrate through the gate stack to extend vertically to the substrate. Each of the channel holes includes a channel region. First channel pads are each disposed at an end of a respective channel hole opposite the substrate. Each of the first channel pads includes at least one first conductivity-type impurity. Second channel pads are each disposed at an end of a respective channel hole opposite the substrate. Each of the second channel pads includes at least one second conductivity-type impurity.
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