- 专利标题: Heat management for inductively coupled plasma systems
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申请号: US17383060申请日: 2021-07-22
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公开(公告)号: US11917744B2公开(公告)日: 2024-02-27
- 发明人: Tak Shun Cheung , Chui Ha Cindy Wong , William Fisher , Hamid Badiei
- 申请人: PERKINELMER SCIENTIFIC CANADA ULC
- 申请人地址: CA Woodbridge
- 专利权人: PERKINELMER SCIENTIFIC CANADA ULC
- 当前专利权人: PERKINELMER SCIENTIFIC CANADA ULC
- 当前专利权人地址: CA Woodbridge
- 代理机构: Myers Bigel, P.A.
- 主分类号: H05H1/28
- IPC分类号: H05H1/28 ; H01J49/10 ; H05H1/46 ; H01J49/04 ; G01J3/44 ; G01J3/443
摘要:
A system for cooling an inductively coupled plasma (ICP) instrument includes: the ICP instrument; a pump in fluid communication with the instrument via a first conduit; and a micro-channel heat exchanger in fluid communication with the instrument via a second conduit, and in fluid communication with the pump via a third conduit. The pump is configured to generate a pump outlet pressure of coolant that exceeds a back pressure of the instrument such that a pressure of the coolant traveling through the second conduit and into the heat exchanger is less than or equal to 5 pounds per square inch (psi) above atmospheric pressure, as measured at an inlet to the heat exchanger.
公开/授权文献
- US20230028640A1 Heat Management for Inductively Coupled Plasma Systems 公开/授权日:2023-01-26
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