Invention Grant
- Patent Title: Cleaning composition and cleaning method using the same
-
Application No.: US17447640Application Date: 2021-09-14
-
Publication No.: US11926807B2Publication Date: 2024-03-12
- Inventor: Jun Her , Na Rae Yim , Hyun Jin Jung , Myung Ho Lee , Myung Geun Song
- Applicant: ENF TECHNOLOGY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: ENF TECHNOLOGY CO., LTD.
- Current Assignee: ENF TECHNOLOGY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR 20200143375 2020.10.30
- Main IPC: C11D3/28
- IPC: C11D3/28 ; C11D3/00 ; C11D3/04 ; C11D3/30 ; C11D3/33 ; C11D3/43 ; C11D7/32 ; C11D11/00

Abstract:
A cleaning composition for removing post-etch or post-ash residues from a semiconductor substrate, and a cleaning method using the same are disclosed. The cleaning composition can comprise water; a fluorine compound; an alkanolamine compound; and a corrosion inhibitor. The corrosion inhibitor is a mixture of a first corrosion inhibitor and a second corrosion inhibitor. When using the cleaning composition, it is possible to efficiently remove the residues of various aspects existing on a surface of the substrate or the semiconductor device without damage to a substrate or a semiconductor device including various metal layers, insulating layers, etc. Accordingly, when a highly integrated and miniaturized semiconductor device is manufactured, it may be advantageously applied to the removal of residues generated on the surface of the substrate or the semiconductor device.
Public/Granted literature
- US20220135915A1 CLEANING COMPOSITION AND CLEANING METHOD USING THE SAME Public/Granted day:2022-05-05
Information query