Invention Grant
- Patent Title: Structures including metal carbide material, devices including the structures, and methods of forming same
-
Application No.: US17583371Application Date: 2022-01-25
-
Publication No.: US11926895B2Publication Date: 2024-03-12
- Inventor: Petri Raisanen , Michael Givens , Eric James Shero
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- The original application number of the division: US14752712 2015.06.26
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/32 ; H01L21/28 ; H01L29/49
Abstract:
Methods of forming thin-film structures including metal carbide material, and structures and devices including the metal carbide material are disclosed. Exemplary structures include metal carbide material formed using two or more different processes (e.g., two or more different precursors), which enables tuning of various metal carbide material properties, including resistivity, current leakage, and work function.
Public/Granted literature
Information query
IPC分类:
