- 专利标题: Semiconductor memory structure
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申请号: US17813891申请日: 2022-07-20
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公开(公告)号: US11942169B2公开(公告)日: 2024-03-26
- 发明人: Hsin-Wen Su , Kian-Long Lim , Wen-Chun Keng , Chang-Ta Yang , Shih-Hao Lin
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes and Boone, LLP
- 主分类号: G11C17/18
- IPC分类号: G11C17/18 ; G11C7/18 ; H10B20/00
摘要:
A semiconductor memory device includes a first word line formed over a first active region. In some embodiments, a first metal line is disposed over and perpendicular to the first word line, where the first metal line is electrically connected to the first word line using a first conductive via, and where the first conductive via is disposed over the first active region. In some examples, the semiconductor memory device further includes a second metal line and a third metal line both parallel to the first metal line and disposed on opposing sides of the first metal line, where the second metal line is electrically connected to a source/drain region of the first active region using a second conductive via, and where the third metal line is electrically connected to the source/drain region of the first active region using a third conductive via.
公开/授权文献
- US20220359026A1 SEMICONDUCTOR MEMORY STRUCTURE 公开/授权日:2022-11-10
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