Invention Grant
- Patent Title: Resist composition and resist film
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Application No.: US16963831Application Date: 2019-01-17
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Publication No.: US11960207B2Publication Date: 2024-04-16
- Inventor: Manabu Hoshino
- Applicant: ZEON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ZEON CORPORATION
- Current Assignee: ZEON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: KENJA IP LAW PC
- Priority: JP 18018504 2018.02.05
- International Application: PCT/JP2019/001207 2019.01.17
- International Announcement: WO2019/150966A 2019.08.08
- Date entered country: 2020-07-22
- Main IPC: G03F7/027
- IPC: G03F7/027 ; C08F212/08 ; C08F220/22 ; C08F265/06 ; G03F7/033 ; G03F7/039

Abstract:
Provided are a resist composition that can improve coatability (coating film formability) with respect to a substrate in spin coating and close adherence of a resist film and that can form a good pattern, and a resist film in which a good pattern is formed. The resist composition contains a polymer, a solvent, and an aromatic vinyl monomer, and has a content of the aromatic vinyl monomer relative to the polymer of not less than 10 mass ppm and not more than 30,000 mass ppm.
Public/Granted literature
- US20210055654A1 RESIST COMPOSITION AND RESIST FILM Public/Granted day:2021-02-25
Information query
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