- 专利标题: Method of manufacturing semiconductor structure
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申请号: US17643417申请日: 2021-12-09
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公开(公告)号: US11967612B2公开(公告)日: 2024-04-23
- 发明人: Ting-Cih Kang , Hsih-Yang Chiu
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理机构: CKC & Partners Co., LLC
- 分案原申请号: US16930328 2020.07.16
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/02 ; H01L29/51
摘要:
A method of manufacturing a semiconductor structure includes the following steps: providing a first semiconductor wafer, wherein the first semiconductor wafer includes a first dielectric layer and at least one first top metallization structure embedded in the first dielectric layer, and a top surface of the first dielectric layer is higher than a top surface of the first top metallization structure by a first distance; providing a second semiconductor wafer, wherein the second semiconductor wafer includes a second dielectric layer and at least one second top metallization structure embedded in the second dielectric layer, and a top surface of the second top metallization structure is higher than a top surface second dielectric layer of the by a second distance; and hybrid-bonding the first semiconductor wafer and the second semiconductor wafer.
公开/授权文献
- US20220102490A1 METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE 公开/授权日:2022-03-31
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