- 专利标题: VCSEL device for an SMI sensor for recording three-dimensional pictures
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申请号: US17124513申请日: 2020-12-17
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公开(公告)号: US11973320B2公开(公告)日: 2024-04-30
- 发明人: Philipp Henning Gerlach
- 申请人: TRUMPF Photonic Components GmbH
- 申请人地址: DE Ulm
- 专利权人: TRUMPF Photonic Components GmbH
- 当前专利权人: TRUMPF Photonic Components GmbH
- 当前专利权人地址: DE Ulm
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: EP 179866 2018.06.26
- 主分类号: H01S5/42
- IPC分类号: H01S5/42 ; G01B9/02 ; H01S5/0234 ; H01S5/183
摘要:
A Vertical Cavity Surface Emitting Laser (VCSEL) includes a VCSEL array, a multitude of detectors, a first electrical laser contact, and at least one second electrical laser contact. The VCSEL array comprises a multitude of laser diodes, each laser diode including an optical resonator having a first distributed Bragg reflector, a second distributed Bragg reflector and an active layer for light emission, the active layer being arranged between the first distributed Bragg reflector and the second distributed Bragg reflector. The first electrical laser contact and the at least one second electrical laser contact are arranged to provide an electrical drive current to electrically pump the optical resonators of the laser diodes. Each detector is arranged to generate an electrical self-mixing interference measurement signal associated to at least one laser diode upon reception of the laser light.
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