Invention Grant
- Patent Title: Method used in forming a memory array comprising strings of memory cells and using bridges in sacrificial material in a tier
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Application No.: US17091238Application Date: 2020-11-06
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Publication No.: US11974429B2Publication Date: 2024-04-30
- Inventor: John D. Hopkins , Jordan D. Greenlee , Nancy M. Lomeli , Alyssa N. Scarbrough
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H10B43/10
- IPC: H10B43/10 ; H01L21/311 ; H01L21/3115 ; H01L21/3213 ; H01L21/3215 ; H10B41/10 ; H10B41/27 ; H10B43/27

Abstract:
A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material in a lowest of the conductive tiers comprises intervenor material. Bridges extend laterally-between the immediately-laterally-adjacent memory blocks. The bridges comprise bridging material that is of different composition from that of the intervenor material. The bridges are longitudinally-spaced-along the immediately-laterally-adjacent memory blocks by the intervenor material and extend laterally into the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
Public/Granted literature
- US20220149066A1 Memory Array And Method Used In Forming A Memory Array Comprising Strings Of Memory Cells Public/Granted day:2022-05-12
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