Invention Grant
- Patent Title: Chemical liquid storage body
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Application No.: US16787197Application Date: 2020-02-11
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Publication No.: US11976001B2Publication Date: 2024-05-07
- Inventor: Tetsuya Kamimura , Masahiro Yoshidome , Yukihisa Kawada
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP 17170832 2017.09.06 JP 18155196 2018.08.22
- Main IPC: B65D23/02
- IPC: B65D23/02 ; C03C17/00 ; C03C17/245 ; C09G1/00 ; G03F7/004 ; H01L21/027

Abstract:
An object of the present invention is to provide a chemical liquid storage body which hardly causes short and defects in a formed wiring board in a case where a chemical liquid stored in the chemical liquid storage body is used in a wiring forming process including photolithography after the chemical liquid storage body is preserved for a certain period of time. The chemical liquid storage body according to an embodiment of the present invention includes a container and a chemical liquid stored in the container, in which the chemical liquid contains at least one kind of specific metal component selected from the group consisting of Fe, Al, Cr, and Ni, a content of the specific metal component in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt, at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms, and provided that B represents a content of sodium atoms in a bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in a surface region with respect to a total mass of the surface region, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion.
Public/Granted literature
- US20200181008A1 CHEMICAL LIQUID STORAGE BODY Public/Granted day:2020-06-11
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