Invention Grant
- Patent Title: Susceptors for induction heating with thermal uniformity
-
Application No.: US16507399Application Date: 2019-07-10
-
Publication No.: US11979965B2Publication Date: 2024-05-07
- Inventor: Xiaohang Li , Kuang-Hui Li , Hamad Saud Alotaibi
- Applicant: King Abdullah University of Science and Technology , KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Applicant Address: SA Thuwal
- Assignee: King Abdullah University of Science and Technology,King Fahd University of Petroleum and Minerals
- Current Assignee: King Abdullah University of Science and Technology,King Fahd University of Petroleum and Minerals
- Current Assignee Address: SA Thuwal; SA Dhahran
- Agency: Billion & Armitage
- Main IPC: H05B6/10
- IPC: H05B6/10 ; C21D9/60 ; C23C16/458 ; C23C16/46 ; C30B25/12 ; H01L21/67 ; H05B6/36

Abstract:
Embodiments of the present disclosure describe a susceptor for chemical vapor deposition comprising a horizontal component with a top surface and a bottom surface, wherein the top surface is configured to support one or more wafers; a vertical component extending from the bottom surface of the horizontal component along a longitudinal axis that is substantially perpendicular to the horizontal component; and a hollow region within the vertical component. Embodiments of the present disclosure describe a susceptor for chemical vapor deposition comprising a horizontal plate with a top surface configured to support one or more wafers, a vertical rod integrated with and perpendicular to the horizontal plate, and a hollow region within the vertical rod for promoting temperature uniformity across the top surface of the horizontal plate.
Public/Granted literature
- US20190335548A1 SUSCEPTORS FOR INDUCTION HEATING WITH THERMAL UNIFORMITY Public/Granted day:2019-10-31
Information query