Invention Grant
- Patent Title: Sensor in an internet-of-things
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Application No.: US17844080Application Date: 2022-06-20
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Publication No.: US11987891B2Publication Date: 2024-05-21
- Inventor: Ming-Ta Lei , Chia-Hua Chu , Hsin-Chih Chiang , Tung-Tsun Chen , Chun-Wen Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT LAW
- Agent Anthony King
- The original application number of the division: US14879018 2015.10.08
- Main IPC: G01N33/00
- IPC: G01N33/00 ; C23F4/00 ; G01N27/12

Abstract:
The present disclosure provides a gas sensor. The gas sensor includes a substrate, a conductor layer over the substrate, wherein the conductor layer includes a conductive pattern including a plurality of openings, the openings being arranged in a repeating pattern, an insulating layer in the plurality of openings and over a top surface of the conductive pattern, wherein the conductive pattern is embedded in the insulating layer, and a gas sensing film over a portion of the insulating layer.
Public/Granted literature
- US20220333251A1 SENSOR IN AN INTERNET-OF-THINGS Public/Granted day:2022-10-20
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