- Patent Title: Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes
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Application No.: US17488176Application Date: 2021-09-28
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Publication No.: US12000865B2Publication Date: 2024-06-04
- Inventor: Uri Frodis
- Applicant: Microfabrica Inc.
- Applicant Address: US CA Van Nuys
- Assignee: Microfabrica Inc.
- Current Assignee: Microfabrica Inc.
- Current Assignee Address: CA Van Nuys
- Agency: Greenberg Traurig
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073 ; G01R3/00

Abstract:
Vertical probes, formed of at least one layer that longitudinally includes a first and a second end and a central portion, with the central portion including at least three compliant arms wherein each of the two outer arms include a material having a yield strength greater than a first amount and the at least one intermediate arm is formed of a material having a yield strength less than the first yield strength amount wherein a yield strength of the material of the intermediate arm has a ratio to that of an outer arm of less than 1, more preferably less than 0.8, even more preferably less than 0.6, and most preferably less than 0.4.
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