Invention Grant
- Patent Title: Susceptor having cooling device
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Application No.: US17113392Application Date: 2020-12-07
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Publication No.: US12002661B2Publication Date: 2024-06-04
- Inventor: Yukihiro Mori , Melvin Verbaas
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- The original application number of the division: US15203433 2016.07.06
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/44 ; C23C16/455 ; C23C16/458 ; C23C16/46 ; C23C16/50 ; C23C16/509 ; C23C16/52 ; H01L21/67
Abstract:
A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.
Public/Granted literature
- US20210087680A1 SUSCEPTOR HAVING COOLING DEVICE Public/Granted day:2021-03-25
Information query
