- 专利标题: Composite component and method for manufacturing the same
-
申请号: US17490424申请日: 2021-09-30
-
公开(公告)号: US12002760B2公开(公告)日: 2024-06-04
- 发明人: Tatsuya Funaki , Shunsuke Abe
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: ArentFox Schiff LLP
- 优先权: JP 19117035 2019.06.25
- 主分类号: H01L23/538
- IPC分类号: H01L23/538 ; H01L21/48 ; H01L21/56 ; H01L23/29 ; H01L23/31
摘要:
A composite component that includes an interposer structure and an electronic component. The interposer structure includes a Si base layer having a first main surface and a second main surface facing each other, a rewiring layer on the first main surface, a through Si via electrically connected to the rewiring layer and penetrating the Si base layer, an interposer electrode facing the second main surface, and an adhesive layer. The electronic component has a surface and a component electrode on the surface and connected to the through Si via, and is located between the interposer electrode and the Si base layer such that the component electrode and the surface are adhered to the second main surface of the Si base layer with the adhesive layer interposed therebetween. The through Si via extends from the second main surface, penetrates the adhesive layer, and is electrically connected to the component electrode.
公开/授权文献
信息查询
IPC分类: