- 专利标题: Sensors and system for in-situ edge ring erosion monitor
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申请号: US16391262申请日: 2019-04-22
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公开(公告)号: US12009236B2公开(公告)日: 2024-06-11
- 发明人: Yaoling Pan , Patrick John Tae , Michael D. Willwerth , Leonard M. Tedeschi , Daniel Sang Byun , Philip Allan Kraus , Phillip A. Criminale , Changhun Lee , Rajinder Dhindsa , Andreas Schmid , Denis M. Koosau
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan, LLP
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01J37/32 ; H01L21/66 ; H03K17/955
摘要:
The present disclosure generally relates to a method and apparatus for determining a metric related to erosion of a ring assembly used in an etching within a plasma processing chamber. In one example, the apparatus is configured to obtain a metric indicative of erosion on an edge ring disposed on a substrate support assembly in a plasma processing chamber. A sensor obtains the metric for the edge ring. The metric correlates to the quantity of erosion in the edge ring. In another example, the ring sensor may be arranged outside of a periphery of a substrate support assembly. The metric may be acquired by the ring sensor through a plasma screen.
公开/授权文献
- US20200335368A1 SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR 公开/授权日:2020-10-22
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