Invention Grant
- Patent Title: Memory cell stack and via formation for a memory device
-
Application No.: US17534953Application Date: 2021-11-24
-
Publication No.: US12022666B2Publication Date: 2024-06-25
- Inventor: David Ross Economy , Andrew Leslie Beemer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- The original application number of the division: US16746645 2020.01.17
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H01L21/321 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H10N70/00 ; H10N70/20

Abstract:
Methods, systems, and devices for via formation in a memory device are described. A memory cell stack for a memory array may be formed. In some examples, the memory cell stack may comprise a storage element. A via may also be formed in an area outside of the memory array, and the via may protrude from a material that surrounds the via. A material may then be formed above the memory cell stack and also above the via, and the top surface of the barrier material may be planarized until at least a portion of the via is exposed. A subsequently formed material may thereby be in direct contact with the top of the via, while a portion of the initially formed material may remain above the memory cell stack.
Public/Granted literature
- US20220165793A1 VIA FORMATION FOR A MEMORY DEVICE Public/Granted day:2022-05-26
Information query