Invention Grant
- Patent Title: Substrate supporting member, substrate treating apparatus including the same and substrate treating method thereof
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Application No.: US17386829Application Date: 2021-07-28
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Publication No.: US12040216B2Publication Date: 2024-07-16
- Inventor: Yong Hoon Hong , Kang Suk Lee , Hyeon Jun Lee , So Young Jang
- Applicant: SEMES Co., Ltd.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: KR 20200099682 2020.08.10
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67

Abstract:
A substrate supporting member capable of controlling the flow of charges on a substrate by controlling ground resistance values of a guide pin and a support pin using a variable resistor, and a substrate treating apparatus including the same are provided. The substrate supporting member includes the body; a support pin installed on the body and for supporting the substrate; a guide pin installed on the body and for supporting the substrate; and a charge control device for controlling a charge around the substrate by controlling an electrical connection between the support pin and a first resistor and an electrical connection between the guide pin and a second resistor.
Information query
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