Invention Grant
- Patent Title: Electron emission device and electron microscope
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Application No.: US17609445Application Date: 2020-03-23
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Publication No.: US12051557B2Publication Date: 2024-07-30
- Inventor: Katsuhisa Murakami , Masayoshi Nagao
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP
- Agency: OSTROLENK FABER LLP
- Priority: JP 19088138 2019.05.08
- International Application: PCT/JP2020/012711 2020.03.23
- International Announcement: WO2020/225991A 2020.11.12
- Date entered country: 2021-11-08
- Main IPC: H01J1/312
- IPC: H01J1/312 ; H01J1/308

Abstract:
An electron emission device having a narrow electron energy range and excellent electron emitting efficiency, and an electron microscope using the electron emission device. An electron emission device having a laminated structure in which a first electrode, an electron accelerating layer made of an insulating film, and a second electrode are laminated in this order, in which the second electrode through which electrons transmit and from whose surface electrons emit, and the energy width of the emitted electrons is 100 meV or more and 600 meV or less. For example, graphene having one or more layers and 20 layers or less can be used as the second electrode, and hexagonal boron nitride can be used as the insulating film.
Public/Granted literature
- US20220216026A1 ELECTRON EMISSION DEVICE AND ELECTRON MICROSCOPE Public/Granted day:2022-07-07
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