Invention Grant
- Patent Title: Substrate positioning device with remote temperature sensor
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Application No.: US17257900Application Date: 2019-06-27
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Publication No.: US12051607B2Publication Date: 2024-07-30
- Inventor: Patriek Adrianus Alphonsus Maria Bruurs , Dennis Herman Caspar Van Banning , Jan-Gerard Cornelis Van Der Toorn , Edwin Cornelis Kadijk
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 185349 2018.07.24 EP 169077 2019.04.12
- International Application: PCT/EP2019/067152 2019.06.27
- International Announcement: WO2020/020564A 2020.01.30
- Date entered country: 2021-01-05
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01K1/14 ; G01K11/125 ; H01J37/20 ; H01J37/244 ; H01L21/68
Abstract:
A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.
Public/Granted literature
- US20210272829A1 SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR Public/Granted day:2021-09-02
Information query
IPC分类:
