公开(公告)号：US12051607B2

公开(公告)日：2024-07-30

申请号：US17257900

申请日：2019-06-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Patriek Adrianus Alphonsus Maria Bruurs ,  Dennis Herman Caspar Van Banning ,  Jan-Gerard Cornelis Van Der Toorn ,  Edwin Cornelis Kadijk

IPC: H01L21/67 ,  G01K1/14 ,  G01K11/125 ,  H01J37/20 ,  H01J37/244 ,  H01L21/68

CPC classification number: H01L21/67248 ,  G01K1/14 ,  G01K11/125 ,  H01J37/20 ,  H01J37/244 ,  H01L21/68 ,  H01J2237/20228 ,  H01J2237/20235

Abstract: A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.

公开(公告)号：US11764027B2

公开(公告)日：2023-09-19

申请号：US16698677

申请日：2019-11-27

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gerard Gosen ,  Sven Antoin Johan Hol ,  Martijn Petrus Christianus Van Heumen ,  Dennis Herman Caspar Van Banning ,  Naseh Hosseini

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J2237/002

Abstract: Systems and methods for cooling an objective lens of a charged-particle beam system are disclosed. According to certain embodiments, the method for cooling an objective lens of a charged-particle beam system comprises receiving a fluid via a fluid input port of a bobbin, circulating the fluid that absorbs heat generated by a plurality of electromagnetic coils of the objective lens, via a plurality of channels distributed in the bobbin, and dispensing the fluid circulated by the plurality of channels via a fluid output port of the bobbin. The bobbin may further comprise a bottom flange proximal to a wafer and a top flange distal from the wafer. The bobbin having the plurality of channels may comprise an additively manufactured monolithic structure.

公开(公告)号：US11385556B2

公开(公告)日：2022-07-12

申请号：US17054194

申请日：2019-05-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Dennis Herman Caspar Van Banning ,  Jeroen Gerard Gosen

IPC: G03F7/20 ,  H01J37/20 ,  H01J37/317

Abstract: An apparatus having: a vacuum chamber for enclosing an article support, the article support configured to support an article such that a volume is defined between the article support and the article, the article support including a plurality of supporting protrusions configured to provide a plane of support for the article; a conduit for providing a fluid to the volume such that the fluid provides heat transfer between the article and the article support; and a controller for controlling the fluid supply to the volume, wherein the controller is configured to control a fluid supply unit to start removing the fluid substantially at a time the article reaches a stable temperature.

公开(公告)号：US20200176215A1

公开(公告)日：2020-06-04

申请号：US16698677

申请日：2019-11-27

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gosen ,  Sven Antoin Johan Hol ,  Martijn Petrus Christianus Van Heumen ,  Dennis Herman Caspar Van Banning ,  Naseh Hosseini

IPC: H01J37/141

Abstract: Systems and methods for cooling an objective lens of a charged-particle beam system are disclosed. According to certain embodiments, the method for cooling an objective lens of a charged-particle beam system comprises receiving a fluid via a fluid input port of a bobbin, circulating the fluid that absorbs heat generated by a plurality of electromagnetic coils of the objective lens, via a plurality of channels distributed in the bobbin, and dispensing the fluid circulated by the plurality of channels via a fluid output port of the bobbin. The bobbin may further comprise a bottom flange proximal to a wafer and a top flange distal from the wafer. The bobbin having the plurality of channels may comprise an additively manufactured monolithic structure.

公开(公告)号：US11942340B2

公开(公告)日：2024-03-26

申请号：US17811047

申请日：2022-07-06

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gerard Gosen ,  Te-Yu Chen ,  Dennis Herman Caspar Van Banning ,  Edwin Cornelis Kadijk ,  Martijn Petrus Christianus Van Heumen ,  Erheng Wang ,  Johannes Andreas Henricus Maria Jacobs

IPC: H01L21/67 ,  G03F7/00

CPC classification number: H01L21/67201 ,  G03F7/70841 ,  G03F7/70858 ,  H01L21/67098

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

公开(公告)号：US11430678B2

公开(公告)日：2022-08-30

申请号：US16514843

申请日：2019-07-17

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gerard Gosen ,  Te-Yu Chen ,  Dennis Herman Caspar Van Banning ,  Edwin Cornelis Kadijk ,  Martijn Petrus Christianus Van Heumen ,  Erheng Wang ,  Johannes Andreas Henricus Maria Jacobs

IPC: H01L21/67 ,  G03F7/20

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

公开(公告)号：US11158484B2

公开(公告)日：2021-10-26

申请号：US16805633

申请日：2020-02-28

Applicant: ASML Netherlands B.V.

Inventor： Dennis Herman Caspar Van Banning ,  Jeroen Gerard Gosen ,  Maarten Lambertus Henricus Ter Heerdt ,  Edwin Cornelis Kadijk

IPC: H01J37/20

Abstract: An e-beam inspection tool is disclosed, the tool comprising, an electron optics system configured to generate an electron beam, an object table configured to hold a specimen, a positioning device configured to position the object table, the positioning device comprising an actuator, wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the generated heat load at least partly based on an actuator heat load generated in the actuator.