- 专利标题: Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused ion beams
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申请号: US17728869申请日: 2022-04-25
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公开(公告)号: US12061159B2公开(公告)日: 2024-08-13
- 发明人: Daniel Totonjian , Aurelien Philippe Jean Maclou Botman , Milos Toth
- 申请人: FEI COMPANY
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理商 Thomas F. Cooney
- 主分类号: G01N23/22
- IPC分类号: G01N23/22 ; G01N23/20 ; G01N23/203 ; G01N23/2206 ; G01N23/2252 ; G01N23/2257
摘要:
Practical implementation of Particle-Induced X-ray Emission (PIXE) on a focused ion beam apparatus or on a dual-beam apparatus comprising both focused-ion beam and scanning microscopy capabilities is described. Accordingly, an analytical method comprises: directing and focusing a beam of ions comprising a mixture of protons and non-hydrogen ions onto a sample, wherein the kinetic energy of ions of the mixture is not greater than 50 kilo-electron-Volts (keV); and detecting and measuring X-rays that are emitted from the sample in response to the impingement of the protons and non-hydrogen ions onto the sample.
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