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公开(公告)号：US20250069842A1
公开(公告)日：2025-02-27
申请号：US18456263
申请日：2023-08-25
Applicant: FEI Company
Inventor： Neel Leslie , James Vickers
Abstract: Systems, components, computer-implemented methods, and algorithms for generating waveform data are described. A method for generating waveform data can include directing a pulsed beam of charged particles toward a sample. The sample can include a conductive feature to which a transient electrical signal is applied. The pulsed beam of charged particles can be characterized by a pulse period measured in units of time. The method can include generating detector data over a period of time corresponding to a multiple of the pulse period. The detector data can be generated based at least in part on interactions between the charged particles and the sample. The method can also include generating waveform data describing the transient electrical signal using the detector data.
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公开(公告)号：US12228484B2
公开(公告)日：2025-02-18
申请号：US17748878
申请日：2022-05-19
Applicant: FEI Company
Inventor： Michal Hrouzek , Krishna Kanth Neelisetty , Petr Wandrol , Libor Novak
IPC: H01J37/305 , G01N1/28 , G01N1/32 , H01J37/20
Abstract: Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime, are disclosed. An example method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises causing a first BIB source to emit a first broad ion beam towards a sample positioned within an interior volume of the BIB polisher while the first BIB source is in emitting the first broad ion beam towards the sample, removing a second BIB source from the BIB polisher that is configured to emit a second broad ion beam towards the sample when in use.
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公开(公告)号：US12223752B2
公开(公告)日：2025-02-11
申请号：US17491260
申请日：2021-09-30
Applicant: FEI Company
Inventor： Ondrej Machek , Pavel Potocek , Tereza Konečná
IPC: G06V20/69 , G01N23/04 , G06F18/214 , G06N3/08 , G06T3/4053 , G06V10/22
Abstract: Disclosed herein are charged particle microscopy (CPM) support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a CPM support apparatus may include: first logic to cause a CPM to generate a single image of a first portion of a specimen; second logic to generate a first mask based on one or more regions-of-interest provided by user annotation of the single image; and third logic to train a machine-learning model using the single image and the one or more regions-of-interest. The first logic may cause the CPM to generate multiple images of corresponding multiple additional portions of the specimen, and the second logic may, after the machine-learning model is trained using the single image and the one or more regions-of-interest, generate multiple masks based on the corresponding images of the additional portions of the specimen using the machine-learning model without retraining.
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公开(公告)号：US20250046568A1
公开(公告)日：2025-02-06
申请号：US18789391
申请日：2024-07-30
Applicant: FEI Company
Inventor： Libor Strakoš , Michal Geryk , Trevan Landin , Zdenêk Král , YoonHae Kim , Pengfu Hsu
Abstract: Embodiments of an analytical instrument system, components, and methods for preparing dose-sensitive samples for microanalysis are described. A method includes receiving location data for a material sample, locating a region of interest (ROI) of the material sample in reference to the location data, cooling the material sample to a cryogenic temperature, depositing a layer over at least a portion of the ROI at the cryogenic temperature, and removing a portion of the material sample at the cryogenic temperature.
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公开(公告)号：US12216029B2
公开(公告)日：2025-02-04
申请号：US17826782
申请日：2022-05-27
Applicant: FEI Company
Inventor： Libor Novak , Tomas Kazda
IPC: G01N1/10
Abstract: The present invention relates to a method for preparing and/or processing a sample. The sample comprises at least one fluid, and the method comprises directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it. The present invention also relates to a system and a computer program product used to carry out the method.
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Patent Agency Ranking
公开(公告)号：US20250005714A1
公开(公告)日：2025-01-02
申请号：US18217129
申请日：2023-06-30
Applicant: FEI Company
Inventor： Matej Dolník , Radim Kríž , Lukáš Malý
IPC: G06T5/50 , G01N1/28 , G06T7/55 , G06T7/73 , H01J37/08 , H01J37/22 , H01J37/304 , H01J37/305
Abstract: Methods and apparatus apply focus stacking to sample preparation, improving accuracy of analytic tasks, facilitating automation, and improving throughput. Focus stacking is applied to a set of sample images having different focus depths, to produce a composite image in which features at different depths are in focus and, optionally, a depth map. A sample location is selected from the composite image and a localized material removal, measurement, or imaging operation is performed based on the sample location. A depth value from the depth map is used to set a working depth of a tool for performing the localized operation. Applications include lamella preparation for cryogenic TEM analysis of biological samples. Other applications, techniques, and variations are disclosed.
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公开(公告)号：US20250003845A1
公开(公告)日：2025-01-02
申请号：US18886921
申请日：2024-09-16
Applicant: FEI Company
Inventor： Ronald Lamers , Hans Persoon , Alphons Theophile Augusta Maria de Waele , Theo Ruijl , Hugo van Leeuwen
Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.
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公开(公告)号：US20240428602A1
公开(公告)日：2024-12-26
申请号：US18592198
申请日：2024-02-29
Applicant: FEI Company , Brammer Bio, LLC
Inventor： Harold Phelippeau , Martinus Bressers , Laure Helene Kairawicz , Steven Milian
Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a scientific instrument support apparatus may include: first logic to receive, from a cryogenic (Cryo) electron microscopy, cryo-microscopy (Cryo-EM) data regarding a biological specimen having a plurality of capsids; second logic to determine a classification for each of the capsids by processing the Cryo-EM data through an AI model trained under various acquisition conditions; and third logic to display the classifications of the capsids in the biological specimen.
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公开(公告)号：US20240416530A1
公开(公告)日：2024-12-19
申请号：US18335759
申请日：2023-06-15
Applicant: FEI Company
Inventor： Jae Kim
Abstract: A precision handling system including a gripper, a flexure, and a ball transfer. The gripper includes a first jaw and a second jaw configured to provide a gripping force therebetween for gripping and moving an object. The flexure is coupled to the gripper and configured to provide compliance in at least one direction. The ball transfer is coupled to the gripper. The ball transfer includes a ball configured to engage the object to transfer the gripping force thereto and configured to spherically rotate to allow the object to move with respect to the first jaw.
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公开(公告)号：US12165835B2
公开(公告)日：2024-12-10
申请号：US17564154
申请日：2021-12-28
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Gerard van Veen
IPC: H01J37/26 , H01J37/147 , H01J37/244
Abstract: An apparatus includes an electron source coupled to provide an electron beam, a beam deflector arranged to provide a pulsed electron beam from the electron beam, a detector arranged to receive the pulsed electron beam after transmitting through a sample, and a controller coupled to control at least the beam deflector and the detector, the controller coupled to or including code that, when executed by the controller, causes the apparatus to establish the pulsed electron beam with pulse characteristics based on control of at least the beam deflector, wherein an illumination window is formed based on the pulse characteristics, the illumination window being a time frame when the sample is illuminated with a pulse of the pulsed electron beam, and to form a detection window for the detector and synchronize the detection window in relation to the illumination window, wherein detection events occurring in the detection window form the basis of an image, wherein the detection window determines a time frame when the detector converts the pulse of the pulsed electron beam transmitted through the sample to an electron induced signal.
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