Invention Grant
- Patent Title: Electrostatic chuck, assembly including the electrostatic chuck, and method of controlling temperature of the electrostatic chuck
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Application No.: US17848824Application Date: 2022-06-24
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Publication No.: US12062565B2Publication Date: 2024-08-13
- Inventor: Joaquin Aguilar Santillan , Hong Gao , Shanker Kuttath , ChangMin Lee
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67
Abstract:
Electrostatic chucks and methods of using electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a heating element embedded within the ceramic body, and two or more temperature measurement devices embedded within the ceramic body. Exemplary methods include measuring temperatures within the electrostatic chuck using two or more vertically spaced-apart temperature measurement devices.
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