Invention Grant
- Patent Title: Buried connection line for peripheral area of a memory device
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Application No.: US17513489Application Date: 2021-10-28
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Publication No.: US12063797B2Publication Date: 2024-08-13
- Inventor: Kyuseok Lee , Sangmin Hwang , Byung Yoon Kim
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H10B99/00
- IPC: H10B99/00 ; H01L21/321 ; H01L21/768 ; H01L21/8238 ; H01L23/528 ; H01L23/535 ; H01L27/092

Abstract:
An apparatus includes a substrate and a memory cell array disposed on the substrate. The apparatus also includes a logic cell disposed on the substrate in a peripheral region adjacent the memory cell array. The apparatus further includes a trench isolation region disposed in the substrate in the peripheral region. The trench isolation region either separates a first active area of the logic cell from a second active area of the logic cell or separates the logic cell from an adjacent logic cell. The logic cell includes a connection line that is buried within the trench isolation region. The connection line can be formed as an extension of a buried word line in the memory cell array region during a same fabrication process that forms the corresponding buried word line. By extending the buried word line into the peripheral region, the buried connection line can be formed without additional processing.
Public/Granted literature
- US20230135653A1 BURIED CONNECTION LINE FOR PERIPHERAL AREA Public/Granted day:2023-05-04
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