Invention Grant
- Patent Title: Substrate treatment device
-
Application No.: US17665657Application Date: 2022-02-07
-
Publication No.: US12074055B2Publication Date: 2024-08-27
- Inventor: Masaya Kamiya , Kensuke Demura
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Yokohama
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: PEARNE & GORDON LLP
- Priority: JP 21028248 2021.02.25 JP 22001464 2022.01.07
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67

Abstract:
A substrate treatment device according to an embodiment includes a placement part that includes a placement platform on which a substrate is placeable and that is configured to rotate the placed substrate, a cooling nozzle configured to supply a cooling gas to a space between the placement platform and the substrate, a liquid supplier configured to supply a liquid to a surface of the substrate opposite to the placement platform side, and a dispersion plate located at a discharge side of the cooling gas of the cooling nozzle. The dispersion plate includes a first hole extending through the dispersion plate in a thickness direction. The first hole is located at a position overlapping a central axis of the cooling nozzle when viewed along a direction along the central axis of the cooling nozzle.
Public/Granted literature
- US20220270914A1 SUBSTRATE TREATMENT DEVICE Public/Granted day:2022-08-25
Information query
IPC分类: